STUDY OF SQUEEZE FILM DAMPING IN A MICRO-BEAM RESONATOR BASED ON MICRO-POLAR THEORY
Abstract
IN THIS PAPER, SQUEEZE FILM DAMPING IN A MICRO-BEAM RESONATOR BASED ON MICROPOLAR THEORY HAS BEEN INVESTIGATED. THE PROPOSED MODEL FOR THIS STUDY CONSISTS OF A CLAMPED-CLAMPED MICRO-BEAM BOUNDED BETWEEN TWO FIXED LAYERS. THE GAP BETWEEN THE MICRO-BEAM AND LAYERS IS FILLED WITH AIR. AS FLUID BEHAVES DIFFERENTLY IN MICRO SCALE THAN MACRO, THE MICRO-SCALE FLUID FIELD IN THE GAP HAS BEEN MODELED BASED ON MICROPOLAR THEORY. EQUATION OF MOTION GOVERNING TRANSVERSE DEFLECTION OF THE MICRO- BEAM BASED ON COUPLE STRESS THEORY AND ALSO NON-LINEAR REYNOLDS EQUATION OF THE FLUID FIELD BASED ON MICROPOLAR THEORY HAVE BEEN NON-DIMENSIONALIZED, LINEARIZED AND SOLVED SIMULTANEOUSLY TO CALCULATE THE QUALITY FACTOR OF THE SQUEEZE FILM DAMPING. THE EFFECT OF MICROPOLAR PARAMETERS OF AIR ON THE VALUES OF QUALITY FACTOR HAS BEEN INVESTIGATED. THE QUALITY FACTORS OF THE SQUEEZE FILM DAMPING FOR DIFFERENT VALUES OF NON-DIMENSION LENGTH OF THE BEAM, SQUEEZE NUMBER AND NON-DIMENSION PRESSURE HAVE BEEN CALCULATED AND COMPARED TO THE OBTAINED VALUES OF QUALITY FACTOR BASED ON CLASSIC THEORY.Downloads
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2015-01-22
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